Machine Learning II
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16:30 – 16:50 |
A Simulation Physics-Guided Neural Network for Predicting Semiconductor Structure with Few Experimental Data QHwan Kim1, Sunghee Lee11, Ami Ma1, Jaeyoon Kim1, Hyeon-Kyun Noh1, Kyu Baik Chang1, Wooyoung Cheon1, Shinwook Yi1, Jaehoon Jeong1, BongSeok Kim2, Young-Seok Kim2 and Dae Sin Kim1 1Computational Science and Engineering Team (Korea) 2Memory Metrology and Inspection Technology Team, Samsung Electronics Co. (Korea) |
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16:50 – 17:10 |
Building Robust Machine Learning Force Fields by Composite Gaussian Approximation Potentials Diego Milardovich, Dominic Waldhoer, Markus Jech, Al-Moatasem Bellah El-Sayed and Tibor Grasser Institute for Microelectronics, Technische Universität Wien (Austria) |
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17:10 – 17:30 |
Surrogate models for device design using sample efficient Deep Learning Rutu Patel, Nihar R. Mohapatra and Ravi S. Hegde Indian Institute of Technology Gandhinagar (India) |
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17:30 – 17:50 |
TCAD Augmented Generative Adversarial Network for Optimizing a Chip-level Size Mask Layout Design in the HARC Etching Process Hyoungcheol Kwon1,3, Hwiwon Seo3, Hyunsuk Huh2, Felipe Iza1, Dongyean Oh3, Sung Kye Park3 and Seonyong Cha3 1The Wolfson School of Mechanical, Electrical and Manufacturing Engineering, Loughborough University (United Kingdom) 2Department of Mechanical Engineering, POSTECH (Republic of Korea) 3R&D Division, SK Hynix Inc. (Republic of Korea) |